Slip Model Performance for Internal MEMS Gas Flows

Matthew McNenly, University of Michigan

Micro-Electro-Mechanical Systems (MEMS) designed to control fluid or maneuver within a fluid environment are classified as fluidic MEMS. The small length scale and average gas velocity associated with fluidic MEMS make it difficult to simulate using accurate and efficient computational methods. To address this problem, slip models have been proposed, in previous literature, as a means to combine very efficient continuum flow solvers with corrected boundary conditions to accurately simulate MEMS gas flows. The purpose of this investigation is to evaluate the performance of four popular slip models found in literature, by measuring their accuracy in predicting the velocity profile, shear stress, and total mass flux of Couette and Poiseuille flows.

Abstract Author(s): Matthew J. McNenly